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Semiconductor & LCD Parts Material

Alumina
Alumina ceramics has the characteristics of heat resistance/abrasion resistance/insulation, and has wide usage from various electronic parts, semiconductor LCD process, space ship, automobile engine to bone transparent in human body. SKC solmics is producing and delivering high purity alumina products that satisfy customers through the slip casting and CIP (Cold Isostatic Pressing) manufacturing techniques according to the product shape during alumina sintering.
Silicon
Domestic Si Spare Part is a business area highly localized, and can be divided into ring type and cathode. SKC solmics is producing product that allows the plasma to focus on wafer during the semiconductor etching process and protecting ESC based on independent technology in polishing and etching areas.
Silicon Carbide
SKC solmics is developing tubes and boats alc tartar products used in the semiconductor low pressure chemical vapor deposition (LP-CVD) process. By producing in the high purity draft response sintering method, 300mm wafer heat processing is possible, and has high purity and excellent heat resistance. Currently, silicon carbide products used in the diffusion process and LP-CVD process are all imported. Hence, it is expected that mass manufacturing can achieve import substitute effect along with new sales.
Aluminum Nitride
AlN is a material with the optimum condition that can resist tough plasma environment while having coefficient of thermal expansion similar to silicon wafer and high heat resistance, and can reduce particle & contamination during the semiconductor process. According to this, the usage is increasing as dry etching, CVD and other process tartar parts.
Quartz
Quartz was developed by GE (General Electric) for high performance lamp. It has relatively high heat resistance to chemical substance, and due to the property of material of ultra high purity material such as semiconductor and optical fiber, it is used in various areas. Quartz products can be divided into diffusion part and spare part and SKC solmics is mainly producing spare parts. Although there is disadvantage of being easy to consumed, due to the effectiveness in the aspect of ultra purity and permeability, it is consistently used in mass storage of wafer degree of integration and enlargement of LCD displays.