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Alumina

Al₂O₃ Part
Summary of Alumina
  • 제품문의 버튼
Alumina (Al₂O₃) ceramics is made by purifying alumina (Al₂O₃) with high technology. The substance that contains over 80% of alumina (Al₂O₃) is called alumina ceramics. Aluminum was obtained from metal since Heroult and Hall, metallurgists of France in 1880s produced by fusion electrolysis. Beginning from the detailed R&D of alumina (Al₂O₃) since 1960s, the ceramic engine was developed, starting the boom of fine ceramics. High purity alumina widely used as fine ceramics generally has over 99.5% purity, and is a minute powder of average particle size under 1 ㎛ that can be relatively easily sintered. Since highpurity alumina has excellent mechanical strength, heat resistance, abrasion resistance and insulation properties, it has wide usage from not only various electronic parts, semiconductor process, space ships, and automobile engines but also bone transplantation of human body in the bio industry. In particular, the demand for this material is increasing according to the development of modern industry.
Property of Material
It has excellent chemical resistance.
As it is in inactive state, it has high resistance to chemical erosion, and is rarely affected by acid, alkali and organic solvent. These properties are excellent in general compared to other metals and plastics.
It has the property of abrasion resistance.
As a material of high density and hardness, it has 15-20 higher abrasion resistance compared to general metallic materials.
Ability as electrical insulator
It has high electrical insulation property in high temperature and insulation property to high voltage, ferroelectricity and low dielectric loss
Excellent heat resistance
The highest usage temperature of alumina ceramics exceeds the melting points of most other metals, and in case of continuous use in practice, it can be used by up to 1600-1700℃. Major competitiveness
Major Competitiveness
Classification Content
Quality
  • - By using calibrated modern measuring equipment, supply the optimal product
  • - Assure quality by cleaning through independent cleaning technology
Technology
  • - Can produce parts for LCD large part of the largest size in Korea
  • - Obtain various production facility from multi-variety large product to small variety mass production products
  • - Obtain professional technical manpower of over 20 years of experience in slip casting sintering
Price
  • - Raw price competitiveness advantage through obtaining stable supply of raw material and independent sintering technology
  • - Enable strategic sales from high added value product to low priced mass production product
Product Introduction
SKC solmics is producing multi-variety small quantity production by choosing slip casting formation technique for complicated and large apparatus. As for ceramic part for general structure, a system for responding to various requests of customers is established that can mass produce small variety product with fine density through CIP (Cold Isostatic Pressing).
Major Product of Alumina Ceramic Part
Product Name Product Purpose and Description
Focus Ring Although it performs plasma location control and insulation functions as in Si Focus Ring, it is mostly used in semiconductor manufacturing equipment, which requiresfunctionality of insulation rather than high purity.
Edge Ring It performs wafer location control function and plasma stabilization function as in Si Edge Ring, and is used in semiconductor manufacturing equipment, which requiresinsulation function.
Ring Confiment Cap It controls the pressure of plasma and is used on the outer part of Si electrodes from the chamber upper part.
Ring Confiment Cap Guide Ring, Rotation Ring Cover, Wafer Chuck, Wafer Clamp, Robot Arm,
Robot Blade, Hot Arm, Cold Arm, Ceramic Pipe, Lift Pin, Ceramic Screw..etc.
Alumina Sintering Technology
For sintering alumina, the slip casting method used by the company in sintering alumina and CIP (Cold Isostatic Press) method used by other companies are used, and all two methods have advantages, disadvantages and entry barriers. Slip casting method forms the shape of product by using plaster mold, pours the slip of a mixture of powder and dispersion medium, and then makes in the kiln after forming by using osmotic pressure. Although it has disadvantage in mass manufacturing, because the injection amount of “binder” is relatively low, high purity alumina product can be made, and because it can shape difficult forms of products, it is suitable for multi-variety small production system. On contrary, CIP (Cold Isostatic Pressing) method forms by applying even pressure to powder in all directions. Although it has an advantage of mass producing simple shaped products, it cannot make products of complicated shape, and due to higher injection amount of “binder”, it has a disadvantage of relatively low purity.
Comparison of Slip Casting and CIP
Item Slip Casting CIP(Cold Isosstatic Pressing)
Property
  • - Suitable for multi-variety small production
  • - Skill level and accumulated technology are required
  • - Suitable for small variety mass productio
  • - High initial investment
Advantage
  • - Not restricted by product shape
  • - Even density of formation
  • - Can be reused as molding material
  • - Maximizes powder yield rate
  • - Low pollution
  • - Can be processed before sintering
  • - Relatively acceptable density
  • - Suitable for molding element with greater ratio of diameter to length
Disadvantage
  • - Needs high amount of labor
  • - Has difficulty of mass production
  • - Low powder yield rate
  • - Cannot be reused as molding material (Low powder yield rate)
  • - Requires environmental pollution prevention facility such as dust collector
  • - Excessive initial investment
Product shape
  • - Complicated shape such as tube, 3D and water
  • - Circular shape (post processing is essential)
  • - Reproduce shape through post processing of mold
Air industry product
  • - Container, tube
  • - Semiconductor equipment part ceramic (Ring, Disk, Plate, Dome, etc.)
  • - Semiconductor equipment part, Ring, Disk, etc.
Table of Property of Matter Omitted
Purity(%) >99.7
Bulk Density(g/cm³) >3.91
Load0.5Kg HV1=9.807N Vickers Hardness(GPa) >17.5
Bending Strength(MPa) CIP >320
Slip >350
Compressive Strength(MPa) 1900
Young's Modulus of Elasticity 400
Poissons Ratio 0.25
Thermal Conductivity(W/mK) 25℃ : 33
Thermal Expansion(x10-6/°C) 25~400℃ : 7.4
25~800℃ : 7.8
Specific Heat([RT]J/kg.K) 25℃ : 0.8
Volume Resistivity(Ω. ㎝) >1014
Dielectric Strength(V/m) 15
Dielectric Constant(25°C 1MHz) 10