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Silicon

Silicon Part
Summary of Silicon
  • 제품문의 버튼
Silicon, widely used as semiconductor element material, is an excellent material that can be stably supplied to semiconductor industry as it is abundantly found in sand, rocks and ores in the oxidized form of SiO₂. Silicon has high purity single crystal structure of 99.9999% after purification process, and has strong durability, high functionality and high reliability by operating element in relatively high temperature (of up to approximately 200℃) due to low change in physical and mechanical properties according to temperature change. Currently, the parts manufactured from silicon that are used in various shapes in semiconductor industry affect all industries including various electronic products, business automation machines, computers and artificial satellites.
Material Property
Has high purity simple crystal structure.
As siloxane (silicon-oxygen) chain is much stronger than the binding energy between carbon and oxygen, it has the advantage of operating element in relatively high temperature (of up to approximately 200℃) due to the advantage of low physical and mechanic property change according to temperature change.
It has abundant resource.
Silicon is the atom that is readily found on Earth next to oxygen.
It is easy to purify.
It is easy to control resistance rate by adjusting the simple crystal and amount of impurity.
Major Competitiveness
Classification Content
Quality
  • - Optimal product management by utilizing regularly calibrated modern 3D measuring equipment
  • - Product particle control by using PAMS device
  • - Purity management through final packaging in clean room of over 10 class
Technology
  • - Automated production by using high precision machining center and independently developed equipment
  • - Scientific process design through damage depth measuring technology
  • - Possessing independent process technology of lapping, polishing and etching processes
Price
  • - Possess raw price competitiveness through growing independent material
  • - Possess reinforced growing process technology by solar business
Product Introduction
SKC solmics is producing most cathodes, and ring types among domestic Si spare parts based on independent technology in lapping, polishing and etching sectors.
Major Technology for Silicon (Si) Processing
Item Technical Content
Material Technology Material growing technology that produces high purity material without defect, is one of the company’s silicon key technologies along with solar business.
Process Technology Silicon material can be damaged in the depth wise direction of the material in all molding and processing procedures. It is important to obtain the optimized process condition while minimizing this damage. Through development of damage analysis technology, tool technology and process condition, we secured the optimized silicon processing technology.
Etching Technology We have developed and possess the etching technology by material and product that can respond to 3D molding by effectively removing surface damage from processing or polishing the surface.
Major Products of Silicon (Si) Part
Item Product Purpose and Description
Si Focus Ring After forming plasma, it helps the plasma to gather in the accurate position within the chamber.
Si Edge Ring It stabilizes the plasma by accurately aligning the wafer and performing the auxiliary function of Si Focus Ring.
Si Electrode It processes the wafer surface by evenly dispersing various gases onto the surface of Si wafer.
Other major products Si Source Ring, Si Inner Ring, Si Slab, Si Heat Shield..etc
Table of Material Property
Purity(%) >8N
Load0.5Kg HV1=9.807N Vickers Hardness(GPa) 10.2
Thermal Conductivity(W/mK) 25℃ : 120
Specific Heat([RT]J/kg.K) 0.6
Thermal Expansion(x10-6/°C) 25~400℃ : 3.5
25~800℃ : 3.9
Volume Resistivity(Ω. ㎝) Low resistance : <0.02Ω. ㎝
General resistance : 1~5Ω. ㎝
High resistance : 60~90Ω. ㎝