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- Quartz
Quartz
Quartz Part
Summary of Quartz
Quartz is a nonconductor with low gas content that contains almost no alkali substance that creates electrical conductivity. It is also called ‘silica glass’. Highly purified quartz glass fiber is an important substance as it has low optical absorption and excellent light guiding property. In semiconductor, it is used in dry etching and diffusion processes.
Optical fiber, used in physical and chemical experimental equipment, and quartz vibrator in clocks and communicators by using heat resistance, heat and shock resistance and chemical resistance properties, has increasing usage as optical parts following the advancement of optical electronics.
Material Property
- It has high purity material property.
- As siloxane (silicon-oxygen) chain is stronger than the binding energy of carbon to oxygen, due to the advantage of low physical and mechanical property change according to temperature change, it has an advantage of operating the element in relatively high temperature (of up to approximately 200℃).
- It has low gas content.
- The material used in semiconductor industry must be extremely pure, and as stability in high temperature is required, quartz is superior over any other ingredients in this aspect.
- Specific heat and specific conductivity
- The material used in semiconductor industry must be extremely pure, and as stability in high temperature is required, quartz is superior over any other ingredients in this aspect.
- It has superior electric insulation ability.
- As quartz is a nonconductor that contains almost no alkali substance that creates electrical conductivity, it is widely used as an insulator in measuring equipment and communication devices.
Major Competitiveness
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Product Introduction
SKC solmics is producing various forms of ring types mostly in spare part among diffusion part and spare part. Also, it has independent technology in precision processing part.
Major Product of Quartz Part
| Item | Product Purpose and Description |
|---|---|
| Focus Ring | It gathers plasma within the chamber to accurate position after forming plasma and has insulation function. Recently, it is partially substituted with Si Focus Ring. |
| 2 stage Ring | It controls the pressure of plasma. |
| Belljar | It controls formation of plasma by penetrating microwaves. |
| Boat type | It is used in the thermal oxidation diffusion CVD (chemical vapor deposition) process, and is used as the container for transporting wafer to process. |
| Tube type | It is used for creating oxidation membrane and diffusion process, and it is the quartz furnace that embraces boat type products. |
| Cap type | It supports the quartz and insulated the heat to prevent internal heat loss. |
| Bath type | This rectangular container is for storage without damaging the wafer during wafer cleaning and etching processes. |
| Other major product | Wide Pocket, Shadow Ring, Base Plate, Lifter Pin, Shield Ring...etc. |
Table of Material Property Omitted
| Purity(%) | 99.99 |
| Bulk Density(g/cm³) | >2.15 |
| Load0.5Kg HV1=9.807N Vickers Hardness(GPa) | 8.6 |
| Bending Strength(MPa) | 70 |
| Compressive Strength(MPa) | 1100 |
| Poissons Ratio | 0.17 |
| Thermal Conductivity(W/mK) | 1.5 |
| Thermal Expansion(x10-6/°C) | 4.3 |
| Specific Heat([RT]J/kg.K) | 0.2 |
| Volume Resistivity(Ω. ㎝) | >1014 |
| Dielectric Constant(25°C 1MHz) | 3.75 |
