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Precision Cleaning

Precision Cleaning
Summary of Precision Cleaning
  • 제품문의 버튼
Precision cleaning business can promote process stabilization by increasing lifetime of parts and minimizing basic material damage from minute pollution from process and improve productivity by reducing particles by removing surface pollution. It is showing high growth rate following the boom of flat display market. In particular, although the importance of cleaning has been highlighted for the components connected to internal and external areas of chamber that directly affects the wafer and glass, due to lack of perception in cleaning, consistent technology development has not been achieved. However, as many companies started to find out the effect of particle on yield, device operation rate and ways to reduce purchasing cost, the cleaning business for equipment and parts is receiving attention.
Property by Cleaning Product
Description Equipment Process Material Solution
Belljar Endura5500 Pre Clean P II Quartz Wet+Plasma
Lid-liner Endura-5500HP CVDTin Ceramic Wet+Dry
Cathode Tel-8500 Oxide Si Dry
Major Competitiveness
Classification Content
Quality
  • - Supply the optimal product by using calibrated modern measuring equipment
  • - Minimize defect rate through final cleaning in clean-room of over 1000 class
Technology
  • - Possess precision cleaning method such as furnace, chemical, dry, CO₂ Cleaning, etc.
  • - Perform ceramic cleaning by combining metal cleaning that removes pollution, existing chemical method and heat processing method
  • - Find out the property of cleaning product based on material processing knowhow, and perform professional cleaning
  • - Planning to expand cleaning by using CO₂ cleaning in extremely low temperature and cleaning method of RF Plasma & Wave Plasma
  • - Scientific process design through damage depth measuring technology
  • - Possess independent process technology of lapping, polishing and etching processes
Price
  • - Reduce cleaning process by establishing automated cleaning facility
  • - Obtain price competitiveness compared to other companies by expanding dry cleaning