Precision cleaning business can promote process stabilization by increasing lifetime of parts and minimizing basic material damage from minute pollution from process and improve productivity by reducing particles by removing surface pollution. It is showing high growth rate following the boom of flat display market.
In particular, although the importance of cleaning has been highlighted for the components connected to internal and external areas of chamber that directly affects the wafer and glass, due to lack of perception in cleaning, consistent technology development has not been achieved.
However, as many companies started to find out the effect of particle on yield, device operation rate and ways to reduce purchasing cost, the cleaning business for equipment and parts is receiving attention.
